Assignee
SEMITHERM
US·3 granted patents·458 citations·filing 1987–1994
Top patents by PatentIndex Score
3 records- 0191US4738618AVertical thermal processorSEMITHERM·Filed 1987·Granted Apr 19, 1988·394 cites·12 claims
- 0290US5000682AVertical thermal processor for semiconductor wafersSEMITHERM·Filed 1990·Granted Mar 19, 1991·47 cites·27 claims
- 0346US5590996AWafer transfer apparatusSEMITHERM·Filed 1994·Granted Jan 7, 1997·17 cites·65 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →