Individual holder
SEIDEL THOMAS E
US·4 granted patents·2 pending applications·5 citations·filing 2005–2020
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
6 records- 0188US10896823B2Limited dose atomic layer processes for localizing coatings on non-planar surfacesSEIDEL THOMAS E·Filed 2019·Granted Jan 19, 2021·5 cites·5 claims
- 0270US10996562B2Method and structure for nanoimprint lithography masks using optical film coatingsSEIDEL THOMAS E·Filed 2018·Granted May 4, 2021·0 cites·16 claims
- 0356US10156786B2Method and structure for nanoimprint lithography masks using optical film coatingsSEIDEL THOMAS E·Filed 2016·Granted Dec 18, 2018·0 cites·6 claims
- 0450US10923359B2Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfacesSEIDEL THOMAS E·Filed 2020·Granted Feb 16, 2021·0 cites·13 claims
- 0550US2005281949A1Massively parallel atomic layer deposition/chemical vapor deposition systemSEIDEL THOMAS E·Filed 2005·Application pending·0 cites
- 0650US2005274323A1Massively parallel atomic layer deposition/chemical vapor deposition systemSEIDEL THOMAS E·Filed 2005·Application pending·0 cites
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