Assignee
SAVAS STEPHEN E
1 granted patent·5 pending applications·5 citations·filing 2005–2007
Top patents by PatentIndex Score
6 records- 0174US7534362B2Uniform etching system and process for large rectangular substratesSAVAS STEPHEN E·Filed 2005·Granted May 19, 2009·5 cites·7 claims
- 0245US2007193602A1Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit ManufacturingSAVAS STEPHEN E·Filed 2007·Application pending·0 cites
- 0345US2007186953A1Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit ManufacturingSAVAS STEPHEN E·Filed 2007·Application pending·0 cites
- 0440US2006011582A1Fast isotropic etching system and process for large, non-circular substratesSAVAS STEPHEN E·Filed 2005·Application pending·0 cites
- 0537US2006045667A1Substrate handling system and process for manufacturing large substratesSAVAS STEPHEN E·Filed 2005·Application pending·0 cites
- 0636US2007269975A1System and method for removal of photoresist and stop layer following contact dielectric etchSAVAS STEPHEN E·Filed 2006·Application pending·0 cites
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