Assignee
SAGAX INSTR AB
SE·3 granted patents·281 citations·filing 1983–1985
Technology mixG01N3
Top patents by PatentIndex Score
3 records- 0192US4647207AEllipsometric method and apparatusSAGAX INSTR AB·Filed 1985·Granted Mar 3, 1987·137 cites·25 claims
- 0288US4558012AMethod and member for detecting and/or measuring the concentration of a chemical substanceSAGAX INSTR AB·Filed 1983·Granted Dec 10, 1985·89 cites·28 claims
- 0381US4655595AEllipsometric method and apparatus for studying physical properties of the surface of a testpieceSAGAX INSTR AB·Filed 1985·Granted Apr 7, 1987·55 cites·22 claims
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