Assignee
RATHSACK BENJAMEN MICHAEL
US·2 granted patents·12 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0176US8176443B2Layout of printable assist features to aid transistor controlRATHSACK BENJAMEN MICHAEL·Filed 2008·Granted May 8, 2012·8 cites·8 claims
- 0273US8318607B2Immersion lithography wafer edge bead removal for wafer and scanner defect preventionRATHSACK BENJAMEN MICHAEL·Filed 2008·Granted Nov 27, 2012·4 cites·13 claims
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