Assignee
RAMAVAJJALA MADHU SUDAN
US·2 granted patents·2 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0144US8112168B2Process and method for a decoupled multi-parameter run-to-run controllerRAMAVAJJALA MADHU SUDAN·Filed 2009·Granted Feb 7, 2012·2 cites·20 claims
- 0235US10500693B2Run-to-run control for chemical mechanical planarizationRAMAVAJJALA MADHU SUDAN·Filed 2012·Granted Dec 10, 2019·0 cites·5 claims
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