Assignee

PRESIDENT AND TRUSTEES OF HARV

US·1 granted patent·269 citations·filing 1992–1992

Technology mixB82B1 B82Y1 G01Q1 G03F1 H01J1 Y10S1

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0196US5252835AMachining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scalePRESIDENT AND TRUSTEES OF HARV·Filed 1992·Granted Oct 12, 1993·269 cites·1 claims

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