Assignee
PENG JUI-CHUN
TW·4 granted patents·5 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0166US8955530B2System and method for cleaning a wafer chuckPENG JUI-CHUN·Filed 2011·Granted Feb 17, 2015·2 cites·9 claims
- 0259US9632426B2In-situ immersion hood cleaningPENG JUI-CHUN·Filed 2011·Granted Apr 25, 2017·1 cites·20 claims
- 0347US8237132B2Method and apparatus for reducing down time of a lithography systemPENG JUI-CHUN·Filed 2009·Granted Aug 7, 2012·2 cites·20 claims
- 0443US9282592B2Rotatable heating-cooling plate and element in proximity theretoPENG JUI-CHUN·Filed 2010·Granted Mar 8, 2016·0 cites·20 claims
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