Assignee
OPTIMETRIX CORP
US·22 granted patents·453 citations·filing 1979–1984
Top patents by PatentIndex Score
22 records- 0193US4383757AOptical focusing systemOPTIMETRIX CORP·Filed 1980·Granted May 17, 1983·67 cites·46 claims
- 0285US4413864AGas bearingOPTIMETRIX CORP·Filed 1981·Granted Nov 8, 1983·33 cites·18 claims
- 0382US4573791AStep-and-repeat projection alignment and exposure systemOPTIMETRIX CORP·Filed 1984·Granted Mar 4, 1986·30 cites·8 claims
- 0482US4345836ATwo-stage wafer prealignment system for an optical alignment and exposure machineOPTIMETRIX CORP·Filed 1979·Granted Aug 24, 1982·27 cites·22 claims
- 0581US4473293AStep-and-repeat projection alignment and exposure systemOPTIMETRIX CORP·Filed 1982·Granted Sep 25, 1984·31 cites·81 claims
- 0678US4452526AStep-and-repeat projection alignment and exposure system with auxiliary optical unitOPTIMETRIX CORP·Filed 1981·Granted Jun 5, 1984·29 cites·27 claims
- 0778US4414749AAlignment and exposure system with an indicium of an axis of motion of the systemOPTIMETRIX CORP·Filed 1981·Granted Nov 15, 1983·35 cites·28 claims
- 0878US4336917AShock and vibration isolation systemOPTIMETRIX CORP·Filed 1979·Granted Jun 29, 1982·24 cites·24 claims
- 0972US4442388AX-Y Addressable workpiece positioner having an improved X-Y address indicia sensorOPTIMETRIX CORP·Filed 1981·Granted Apr 10, 1984·22 cites·48 claims
- 1070US4389701AIllumination systemOPTIMETRIX CORP·Filed 1980·Granted Jun 21, 1983·21 cites·10 claims
- 1167US4540278AOptical focusing systemOPTIMETRIX CORP·Filed 1984·Granted Sep 10, 1985·18 cites·16 claims
- 1265US4328941AShock and vibration isolation systemOPTIMETRIX CORP·Filed 1979·Granted May 11, 1982·16 cites·8 claims
- 1365US4311390AInterferometrically controlled stage with precisely orthogonal axes of motionOPTIMETRIX CORP·Filed 1980·Granted Jan 19, 1982·17 cites·40 claims
- 1464US4350428AShutter mechanismOPTIMETRIX CORP·Filed 1979·Granted Sep 21, 1982·5 cites·14 claims
- 1562US4425537AX-Y Addressable workpiece positioner and mask aligner using sameOPTIMETRIX CORP·Filed 1980·Granted Jan 10, 1984·16 cites·12 claims
- 1660US4422755AFrontal illumination system for semiconductive wafersOPTIMETRIX CORP·Filed 1982·Granted Dec 27, 1983·16 cites·19 claims
- 1753US4443096AOn machine reticle inspection deviceOPTIMETRIX CORP·Filed 1981·Granted Apr 17, 1984·11 cites·19 claims
- 1848US4597664AStep-and-repeat projection alignment and exposure system with auxiliary optical unitOPTIMETRIX CORP·Filed 1984·Granted Jul 1, 1986·9 cites·2 claims
- 1946US4496194AGas bearingOPTIMETRIX CORP·Filed 1983·Granted Jan 29, 1985·9 cites·18 claims
- 2043US4393727AFriction driveOPTIMETRIX CORP·Filed 1980·Granted Jul 19, 1983·7 cites·10 claims
- 2140US4330752APosition control circuitOPTIMETRIX CORP·Filed 1979·Granted May 18, 1982·6 cites·15 claims
- 2233US4355272AShutter mechanismOPTIMETRIX CORP·Filed 1979·Granted Oct 19, 1982·4 cites·12 claims
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