Assignee
NOLSCHER CHRISTOPH
0 granted patents·2 pending applications·0 citations·filing 2005–2006
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0143US2007075276A1Exposure system and method for operating an exposure systemNOLSCHER CHRISTOPH·Filed 2006·Application pending·0 cites
- 0240US2005287446A1Method for the photolithographic projection of a pattern onto a semiconductor wafer with an alternating phase maskNOLSCHER CHRISTOPH·Filed 2005·Application pending·0 cites
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