Assignee
NISHIMURA EIICHI
JP·11 granted patents·3 pending applications·60 citations·filing 2007–2012
Top patents by PatentIndex Score
14 records- 0195US8551289B2Plasma processing apparatusNISHIMURA EIICHI·Filed 2010·Granted Oct 8, 2013·46 cites·19 claims
- 0274US8778206B2Substrate processing method and storage mediumNISHIMURA EIICHI·Filed 2012·Granted Jul 15, 2014·3 cites·10 claims
- 0371US8173357B2Method of forming etching mask, etching method using the etching mask, and method of fabricating semiconductor device including the etching methodNISHIMURA EIICHI·Filed 2009·Granted May 8, 2012·3 cites·9 claims
- 0469US8679985B2Dry etching method for silicon nitride filmNISHIMURA EIICHI·Filed 2010·Granted Mar 25, 2014·2 cites·8 claims
- 0568US9165784B2Substrate processing method and storage mediumNISHIMURA EIICHI·Filed 2012·Granted Oct 20, 2015·2 cites·4 claims
- 0666US8961737B2Plasma processing apparatusNISHIMURA EIICHI·Filed 2009·Granted Feb 24, 2015·1 cites·6 claims
- 0764US8608974B2Substrate processing methodNISHIMURA EIICHI·Filed 2011·Granted Dec 17, 2013·1 cites·9 claims
- 0863US8124536B2Manufacturing method of capacitor electrode, manufacturing system of capacitor electrode, and storage mediumNISHIMURA EIICHI·Filed 2007·Granted Feb 28, 2012·1 cites·8 claims
- 0962US8262921B2Substrate processing method, substrate processing apparatus and recording mediumNISHIMURA EIICHI·Filed 2008·Granted Sep 11, 2012·1 cites·3 claims
- 1057US8129285B2Substrate processing systemNISHIMURA EIICHI·Filed 2009·Granted Mar 6, 2012·0 cites·12 claims
- 1148US2011303642A1Substrate processing system, substrate processing method, and storage mediumNISHIMURA EIICHI·Filed 2011·Application pending·0 cites
- 1246US8114781B2Substrate processing method and substrate processing apparatusNISHIMURA EIICHI·Filed 2007·Granted Feb 14, 2012·0 cites·9 claims
- 1340US2012190207A1Plasma processing apparatus and plasma processing methodNISHIMURA EIICHI·Filed 2012·Application pending·0 cites
- 1438US2007275560A1Method of manufacturing semiconductor deviceNISHIMURA EIICHI·Filed 2007·Application pending·0 cites
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