Individual holder
NEMANI SRINIVAS D
US·5 granted patents·143 citations·filing 2008–2013
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0197US9165783B2Method of patterning a low-k dielectric filmNEMANI SRINIVAS D·Filed 2013·Granted Oct 20, 2015·118 cites·17 claims
- 0288US8741775B2Method of patterning a low-K dielectric filmNEMANI SRINIVAS D·Filed 2011·Granted Jun 3, 2014·9 cites·9 claims
- 0384US8153348B2Process sequence for formation of patterned hard mask film (RFP) without need for photoresist or dry etchNEMANI SRINIVAS D·Filed 2008·Granted Apr 10, 2012·9 cites·15 claims
- 0480US8940642B2Method of multiple patterning of a low-K dielectric filmNEMANI SRINIVAS D·Filed 2011·Granted Jan 27, 2015·5 cites·24 claims
- 0566US8871650B2Post etch treatment (PET) of a low-K dielectric filmNEMANI SRINIVAS D·Filed 2012·Granted Oct 28, 2014·2 cites·13 claims
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