Assignee
NAWOTEC GMBH
DE·6 granted patents·1 pending application·182 citations·filing 2000–2007
Top patents by PatentIndex Score
7 records- 0192US6909104B1Miniaturized terahertz radiation sourceNAWOTEC GMBH·Filed 2000·Granted Jun 21, 2005·123 cites·23 claims
- 0288US7232997B2Apparatus and method for investigating or modifying a surface with a beam of charged particlesNAWOTEC GMBH·Filed 2005·Granted Jun 19, 2007·16 cites·36 claims
- 0387US7452477B2Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surfaceNAWOTEC GMBH·Filed 2003·Granted Nov 18, 2008·28 cites·24 claims
- 0482US7537708B2Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surfaceNAWOTEC GMBH·Filed 2007·Granted May 26, 2009·12 cites·19 claims
- 0550US6967714B2Method for determining a refractive indexNAWOTEC GMBH·Filed 2001·Granted Nov 22, 2005·2 cites·16 claims
- 0640US2005103272A1Material processing system and methodNAWOTEC GMBH·Filed 2004·Application pending·0 cites
- 0738US6903549B2Electron spectrometerNAWOTEC GMBH·Filed 2001·Granted Jun 7, 2005·1 cites·48 claims
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