Assignee
NAM DONG-SEOK
0 granted patents·2 pending applications·0 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0146US2009059197A1Exposure apparatus and method of exposing a semiconductor substrateNAM DONG-SEOK·Filed 2008·Application pending·0 cites
- 0244US2008062397A1Photolithography Apparatus Having Mirror for Correcting Aberrations in Optical Illumination System and Mirror Having Aberration Correcting PartNAM DONG-SEOK·Filed 2007·Application pending·0 cites
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