Assignee
NAGAHARA TATSURO
JP·1 granted patent·4 pending applications·5 citations·filing 2003–2012
Top patents by PatentIndex Score
5 records- 0163US8889229B2Method for formation of siliceous film and siliceous film formed by the methodNAGAHARA TATSURO·Filed 2009·Granted Nov 18, 2014·5 cites·11 claims
- 0241US2007148591A1Pattern and wiring pattern and processes for producing themNAGAHARA TATSURO·Filed 2006·Application pending·0 cites
- 0338US2006160014A1Photosensitive composition for interlayer dielectric and method of forming patterned interlayer dielectricNAGAHARA TATSURO·Filed 2003·Application pending·0 cites
- 0435US2005287469A1Photosensitive composition for interlayer dielectric and method of forming patterned interlayer dielectricNAGAHARA TATSURO·Filed 2003·Application pending·0 cites
- 0530US2013316515A1Method for producing silicon dioxide filmNAGAHARA TATSURO·Filed 2012·Application pending·0 cites
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