Assignee
MURATA HITOSHI
JP·4 granted patents·5 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0176US9460946B2Substrate processing apparatus and heating equipmentMURATA HITOSHI·Filed 2011·Granted Oct 4, 2016·4 cites·8 claims
- 0263US8847124B2Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the sameMURATA HITOSHI·Filed 2010·Granted Sep 30, 2014·1 cites·7 claims
- 0348US8535444B2Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating partMURATA HITOSHI·Filed 2009·Granted Sep 17, 2013·0 cites·4 claims
- 0436US9064912B2Heating device, substrate processing apparatus, and method of manufacturing semiconductor deviceMURATA HITOSHI·Filed 2010·Granted Jun 23, 2015·0 cites·11 claims
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