Assignee
MORI KAZUNORI
JP·3 granted patents·13 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0188US8791293B2Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation methodMORI KAZUNORI·Filed 2012·Granted Jul 29, 2014·6 cites·10 claims
- 0284US8686098B2Fluorine-containing compound, fluorine-containing polymer compound, resist composition, top coat composition and pattern formation methodMORI KAZUNORI·Filed 2010·Granted Apr 1, 2014·4 cites·19 claims
- 0374US8592540B2Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using sameMORI KAZUNORI·Filed 2009·Granted Nov 26, 2013·3 cites·19 claims
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