Assignee
METRYX LTD
GB·13 granted patents·6 pending applications·96 citations·filing 2001–2023
Top patents by PatentIndex Score
19 records- 0192US7340372B2Apparatus and method for investigating parameters of layers deposited on semiconductor wafersMETRYX LTD·Filed 2005·Granted Mar 4, 2008·22 cites·12 claims
- 0287US8357548B2Semiconductor wafer metrology apparatus and methodMETRYX LTD·Filed 2008·Granted Jan 22, 2013·11 cites·5 claims
- 0385US9818658B2Semiconductor wafer processing methods and apparatusMETRYX LTD·Filed 2014·Granted Nov 14, 2017·7 cites·20 claims
- 0485US7020577B2Apparatus and method for investigating semiconductors waferMETRYX LTD·Filed 2001·Granted Mar 28, 2006·31 cites·6 claims
- 0583US8364302B2Method of controlling semiconductor device fabricationMETRYX LTD·Filed 2009·Granted Jan 29, 2013·7 cites·14 claims
- 0681US9228886B2Semiconductor wafer weight metrology apparatusMETRYX LTD·Filed 2012·Granted Jan 5, 2016·4 cites·7 claims
- 0781US7892863B2Measuring apparatusMETRYX LTD·Filed 2007·Granted Feb 22, 2011·11 cites·10 claims
- 0872US8594827B2Method of controlling semiconductor device fabricationMETRYX LTD·Filed 2012·Granted Nov 26, 2013·2 cites·6 claims
- 0960US9903750B2Method and device for determining information relating to the mass of a semiconductor waferMETRYX LTD·Filed 2014·Granted Feb 27, 2018·1 cites·31 claims
- 1055US9310244B2Semiconductor wafer metrology apparatus and methodMETRYX LTD·Filed 2014·Granted Apr 12, 2016·0 cites·10 claims
- 1154US9995783B2Measurement apparatus and methodMETRYX LTD·Filed 2016·Granted Jun 12, 2018·0 cites·8 claims
- 1248US2026009671A1Support for a weighing deviceMETRYX LTD·Filed 2023·Application pending·0 cites
- 1346US2025155273A1Weighing device for a semiconductor waferMETRYX LTD·Filed 2023·Application pending·0 cites
- 1444US2024347352A1Device for changing the temperature of a waferMETRYX LTD·Filed 2022·Application pending·0 cites
- 1543US2024210232A1Apparatus comprising a weighing deviceMETRYX LTD·Filed 2022·Application pending·0 cites
- 1637US12546646B2Method and apparatus for controlling the temperature of a semiconductor waferMETRYX LTD·Filed 2019·Granted Feb 10, 2026·0 cites·20 claims
- 1737US2025102349A1Weighing deviceMETRYX LTD·Filed 2023·Application pending·0 cites
- 1835US12288702B2Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology methodMETRYX LTD·Filed 2019·Granted Apr 29, 2025·0 cites·21 claims
- 1933US2017115158A1Semiconductor wafer weighing apparatus and methodsMETRYX LTD·Filed 2015·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →