Assignee
MEMSSTAR LTD
GB·3 granted patents·3 pending applications·0 citations·filing 2017–2025
Top patents by PatentIndex Score
6 records- 0178US2025326634A1Method of manufacturing a microstructureMEMSSTAR LTD·Filed 2025·Application pending·0 cites
- 0278US2025326633A1Method of manufacturing a microstructureMEMSSTAR LTD·Filed 2025·Application pending·0 cites
- 0365US12358784B2Method of manufacturing a microstructureMEMSSTAR LTD·Filed 2020·Granted Jul 15, 2025·0 cites·6 claims
- 0447US2024239649A1Method of manufacturing a microstructureMEMSSTAR LTD·Filed 2022·Application pending·0 cites
- 0543US10173894B2Selectivity in a xenon difluoride etch processMEMSSTAR LTD·Filed 2017·Granted Jan 8, 2019·0 cites·13 claims
- 0642US11740185B2Method for detecting defects in thin film layersMEMSSTAR LTD·Filed 2019·Granted Aug 29, 2023·0 cites·31 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →