Assignee
MATSUO TADASHI
JP·2 granted patents·6 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0183US8962220B2Reflective photomask and reflective photomask blankMATSUO TADASHI·Filed 2010·Granted Feb 24, 2015·6 cites·7 claims
- 0241US8394558B2Reflection type photomask blank, manufacturing method thereof, reflection type photomask, and manufacturing method of semiconductor deviceMATSUO TADASHI·Filed 2008·Granted Mar 12, 2013·0 cites·10 claims
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