Assignee
MATSUI HIDEFUMI
JP·3 granted patents·7 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0172US8585831B2Substrate cleaning methodMATSUI HIDEFUMI·Filed 2010·Granted Nov 19, 2013·3 cites·6 claims
- 0267US9209010B2Substrate cleaning method and substrate cleaning deviceMATSUI HIDEFUMI·Filed 2011·Granted Dec 8, 2015·2 cites·24 claims
- 0364US8475602B2Substrate cleaning method and apparatusMATSUI HIDEFUMI·Filed 2009·Granted Jul 2, 2013·2 cites·14 claims
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