Individual holder
MARSH EUGENE P
US·25 granted patents·4 pending applications·636 citations·filing 2005–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
29 records- 0199US8945305B2Methods of selectively forming a material using parylene coatingMARSH EUGENE P·Filed 2010·Granted Feb 3, 2015·495 cites·18 claims
- 0297US8294139B2Multilayer antireflection coatings, structures and devices including the same and methods of making the sameMARSH EUGENE P·Filed 2007·Granted Oct 23, 2012·47 cites·15 claims
- 0396US8551808B2Methods of patterning a substrate including multilayer antireflection coatingsMARSH EUGENE P·Filed 2012·Granted Oct 8, 2013·23 cites·20 claims
- 0496US8148197B2Methods of forming germanium-antimony-tellurium materials and a method of forming a semiconductor device structure including the sameMARSH EUGENE P·Filed 2010·Granted Apr 3, 2012·10 cites·18 claims
- 0593US8225745B2Chemical vaporizer for material deposition systems and associated methodsMARSH EUGENE P·Filed 2011·Granted Jul 24, 2012·5 cites·12 claims
- 0691US8759146B2Methods of forming germanium-antimony-tellurium materials and methods of forming a semiconductor device structure including the sameMARSH EUGENE P·Filed 2012·Granted Jun 24, 2014·4 cites·21 claims
- 0791US8541765B2Resistance variable memory cell structures and methodsMARSH EUGENE P·Filed 2010·Granted Sep 24, 2013·10 cites·30 claims
- 0890US8853713B2Resistive memory having confined filament formationMARSH EUGENE P·Filed 2012·Granted Oct 7, 2014·9 cites·14 claims
- 0989US8256695B2Method for purification of semiconducting single wall nanotubesMARSH EUGENE P·Filed 2011·Granted Sep 4, 2012·4 cites·20 claims
- 1084US8420534B2Atomic layer deposition of crystalline PrCaMnO (PCMO) and related methodsMARSH EUGENE P·Filed 2010·Granted Apr 16, 2013·2 cites·20 claims
- 1184US8314456B2Apparatus including rhodium-based charge trapsMARSH EUGENE P·Filed 2011·Granted Nov 20, 2012·6 cites·25 claims
- 1284US8222127B2Methods of forming structures having nanotubes extending between opposing electrodes and structures including sameMARSH EUGENE P·Filed 2008·Granted Jul 17, 2012·6 cites·19 claims
- 1379US8753933B2Methods for forming a conductive material, methods for selectively forming a conductive material, methods for forming platinum, and methods for forming conductive structuresMARSH EUGENE P·Filed 2008·Granted Jun 17, 2014·2 cites·15 claims
- 1477US8124541B2Etchant gas and a method for removing material from a late transition metal structureMARSH EUGENE P·Filed 2007·Granted Feb 28, 2012·4 cites·20 claims
- 1577US7078326B1Nucleation method for atomic layer deposition of cobalt on bare silicon during the formation of a semiconductor deviceMARSH EUGENE P·Filed 2005·Granted Jul 18, 2006·4 cites·22 claims
- 1675US9496491B2Methods of forming a metal chalcogenide material and related methods of forming a memory cellMARSH EUGENE P·Filed 2012·Granted Nov 15, 2016·2 cites·24 claims
- 1773US8455296B2Semiconductor processingMARSH EUGENE P·Filed 2011·Granted Jun 4, 2013·2 cites·17 claims
- 1870US8697486B2Methods of forming phase change materials and methods of forming phase change memory circuitryMARSH EUGENE P·Filed 2009·Granted Apr 15, 2014·0 cites·18 claims
- 1968US8551564B2Chemical vaporizer for material deposition systems and associated methodsMARSH EUGENE P·Filed 2012·Granted Oct 8, 2013·0 cites·9 claims
- 2067US8624225B2Methods of forming structures having nanotubes extending between opposing electrodes and structures including sameMARSH EUGENE P·Filed 2012·Granted Jan 7, 2014·1 cites·17 claims
- 2161US2012321876A1Articles having semiconductive carbon nanotubesMARSH EUGENE P·Filed 2012·Application pending·0 cites
- 2257US8593784B2Thin film structure that may be used with an adhesion layerMARSH EUGENE P·Filed 2007·Granted Nov 26, 2013·0 cites·11 claims
- 2354US8840990B2Porous organosilicate layers, and vapor deposition systems and methods for preparing sameMARSH EUGENE P·Filed 2011·Granted Sep 23, 2014·0 cites·17 claims
- 2454US8475677B2Etchant gasMARSH EUGENE P·Filed 2012·Granted Jul 2, 2013·0 cites·13 claims
- 2554US2010075037A1Deposition Systems, ALD Systems, CVD Systems, Deposition Methods, ALD Methods and CVD MethodsMARSH EUGENE P·Filed 2008·Application pending·0 cites
- 2653US8431240B2Metal plating using seed filmMARSH EUGENE P·Filed 2010·Granted Apr 30, 2013·0 cites·14 claims
- 2753US8206603B2Methods of etching nanodots, methods of fabricating integrated circuit devices and device structures, methods of etching a layer comprising a late transition metal, and methods of forming a plurality of transistor gate constructionsMARSH EUGENE P·Filed 2011·Granted Jun 26, 2012·0 cites·26 claims
- 2853US2007093018A1Dielectric material forming methods and enhanced dielectric materialsMARSH EUGENE P·Filed 2006·Application pending·0 cites
- 2948US2006249229A1Metal layer forming methods and capacitor electrode forming methodsMARSH EUGENE P·Filed 2006·Application pending·0 cites
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