Assignee
MAROKKEY SAJAN
US·4 granted patents·2 pending applications·13 citations·filing 2007–2010
Top patents by PatentIndex Score
6 records- 0187US8450122B2Test structures and methodsMAROKKEY SAJAN·Filed 2010·Granted May 28, 2013·7 cites·8 claims
- 0282US8203223B2Overlay target for polarized light lithographyMAROKKEY SAJAN·Filed 2010·Granted Jun 19, 2012·3 cites·20 claims
- 0369US8183129B2Alignment marks for polarized light lithography and method for use thereofMAROKKEY SAJAN·Filed 2010·Granted May 22, 2012·2 cites·27 claims
- 0464US8330937B2Stray light feedback for dose control in semiconductor lithography systemsMAROKKEY SAJAN·Filed 2009·Granted Dec 11, 2012·1 cites·18 claims
- 0547US2009201474A1Semiconductor Devices and Methods of Manufacture ThereofMAROKKEY SAJAN·Filed 2008·Application pending·0 cites
- 0646US2009091729A1Lithography Systems and Methods of Manufacturing Using ThereofMAROKKEY SAJAN·Filed 2007·Application pending·0 cites
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