Assignee
MALLICK ABHIJIT BASU
US·3 granted patents·3 pending applications·585 citations·filing 2010–2012
Top patents by PatentIndex Score
6 records- 0198US8242031B2High quality silicon oxide films by remote plasma CVD from disilane precursorsMALLICK ABHIJIT BASU·Filed 2010·Granted Aug 14, 2012·570 cites·8 claims
- 0288US8765573B2Air gap formationMALLICK ABHIJIT BASU·Filed 2011·Granted Jul 1, 2014·9 cites·20 claims
- 0384US8580699B2Embedded catalyst for atomic layer deposition of silicon oxideMALLICK ABHIJIT BASU·Filed 2011·Granted Nov 12, 2013·6 cites·19 claims
- 0441US2013217239A1Flowable silicon-and-carbon-containing layers for semiconductor processingMALLICK ABHIJIT BASU·Filed 2012·Application pending·0 cites
- 0540US2013217240A1Flowable silicon-carbon-nitrogen layers for semiconductor processingMALLICK ABHIJIT BASU·Filed 2012·Application pending·0 cites
- 0639US2012213940A1Atomic layer deposition of silicon nitride using dual-source precursor and interleaved plasmaMALLICK ABHIJIT BASU·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when MALLICK ABHIJIT BASU files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →