Assignee
LITMAS INC
US·3 granted patents·328 citations·filing 1999–2000
Top patents by PatentIndex Score
3 records- 0195US6291938B1Methods and apparatus for igniting and sustaining inductively coupled plasmaLITMAS INC·Filed 2000·Granted Sep 18, 2001·123 cites·31 claims
- 0294US6156667AMethods and apparatus for plasma processingLITMAS INC·Filed 2000·Granted Dec 5, 2000·111 cites·22 claims
- 0391US6326584B1Methods and apparatus for RF power deliveryLITMAS INC·Filed 1999·Granted Dec 4, 2001·94 cites·35 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →