Assignee

LIN XINJIA

CN·1 granted patent·3 citations·filing 2014–2014

Technology mixB62B1 H01L1 H10P1

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1 record

0161US9390952B2Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipmentLIN XINJIA·Filed 2014·Granted Jul 12, 2016·3 cites·9 claims

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