Assignee
LI SHIFANG
US·6 granted patents·47 citations·filing 2007–2011
Top patents by PatentIndex Score
6 records- 0196US8289527B2Optimization of ray tracing and beam propagation parametersLI SHIFANG·Filed 2010·Granted Oct 16, 2012·20 cites·19 claims
- 0289US8570531B2Method of regenerating diffraction signals for optical metrology systemsLI SHIFANG·Filed 2011·Granted Oct 29, 2013·8 cites·20 claims
- 0388US8812277B2Method of enhancing an optical metrology system using ray tracing and flexible ray librariesLI SHIFANG·Filed 2011·Granted Aug 19, 2014·10 cites·22 claims
- 0481US8838422B2Process control using ray tracing-based libraries and machine learning systemsLI SHIFANG·Filed 2011·Granted Sep 16, 2014·6 cites·21 claims
- 0569US8069020B2Generating simulated diffraction signal using a dispersion function relating process parameter to dispersionLI SHIFANG·Filed 2007·Granted Nov 29, 2011·2 cites·14 claims
- 0660US9103664B2Automated process control using an adjusted metrology output signalLI SHIFANG·Filed 2010·Granted Aug 11, 2015·1 cites·15 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →