Assignee
LEE YUNG-YAO
TW·4 granted patents·21 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0194US8703368B2Lithography processLEE YUNG-YAO·Filed 2012·Granted Apr 22, 2014·14 cites·20 claims
- 0279US9188876B2Method of determining overlay error and control system for dynamic control of reticle positionLEE YUNG-YAO·Filed 2012·Granted Nov 17, 2015·3 cites·20 claims
- 0379US8860941B2Tool induced shift reduction determination for overlay metrologyLEE YUNG-YAO·Filed 2012·Granted Oct 14, 2014·3 cites·19 claims
- 0457US8476003B2Iterative rinse for semiconductor fabricationLEE YUNG-YAO·Filed 2011·Granted Jul 2, 2013·1 cites·19 claims
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