Assignee
LEE BEUNG-KEUN
0 granted patents·2 pending applications·0 citations·filing 2006–2006
Top patents by PatentIndex Score
2 records- 0140US2007048869A1Valve system and deposition apparatus including valve system and atomic layer deposition chamberLEE BEUNG-KEUN·Filed 2006·Application pending·0 cites
- 0230US2006175012A1Semiconductor fabrication equipment and method for controlling pressureLEE BEUNG-KEUN·Filed 2006·Application pending·0 cites
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