Assignee
KOROLIK MIKHAIL
US·4 granted patents·1 pending application·2 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0172US8242067B2Two-phase substrate cleaning materialKOROLIK MIKHAIL·Filed 2010·Granted Aug 14, 2012·2 cites·18 claims
- 0258US2009320884A1Controls of ambient environment during wafer drying using proximity headKOROLIK MIKHAIL·Filed 2009·Application pending·0 cites
- 0351US8691027B2Method for removing material from semiconductor wafer and apparatus for performing the sameKOROLIK MIKHAIL·Filed 2012·Granted Apr 8, 2014·0 cites·16 claims
- 0450US8590550B2Apparatus for cleaning contaminants from substrateKOROLIK MIKHAIL·Filed 2010·Granted Nov 26, 2013·0 cites·17 claims
- 0547US8323420B2Method for removing material from semiconductor wafer and apparatus for performing the sameKOROLIK MIKHAIL·Filed 2005·Granted Dec 4, 2012·0 cites·23 claims
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