Assignee
KOFUJI NAOYUKI
JP·2 granted patents·5 pending applications·10 citations·filing 2006–2012
Top patents by PatentIndex Score
7 records- 0177US8093529B2Control method of a temperature of a sampleKOFUJI NAOYUKI·Filed 2008·Granted Jan 10, 2012·6 cites·20 claims
- 0276US8791027B2Method of manufacturing semiconductor deviceKOFUJI NAOYUKI·Filed 2010·Granted Jul 29, 2014·4 cites·8 claims
- 0351US2008154422A1Control Method for plasma etching apparatusKOFUJI NAOYUKI·Filed 2008·Application pending·0 cites
- 0450US2013087285A1Plasma etching apparatusKOFUJI NAOYUKI·Filed 2012·Application pending·0 cites
- 0548US2007199657A1Apparatus and method for plasma etchingKOFUJI NAOYUKI·Filed 2006·Application pending·0 cites
- 0647US2008078505A1Plasma etching apparatus and plasma etching methodKOFUJI NAOYUKI·Filed 2007·Application pending·0 cites
- 0742US2010167426A1Plasma etching apparatus and plasma etching methodKOFUJI NAOYUKI·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →