Assignee
KIMBA TOSHIFUMI
JP·7 granted patents·1 pending application·44 citations·filing 2005–2012
Top patents by PatentIndex Score
8 records- 0195US8822919B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerKIMBA TOSHIFUMI·Filed 2011·Granted Sep 2, 2014·15 cites·10 claims
- 0290US8115912B2Polishing end point detection method, polishing end point detection apparatus, and polishing apparatusKIMBA TOSHIFUMI·Filed 2011·Granted Feb 14, 2012·7 cites·18 claims
- 0382US8280664B2XY-coordinate compensation apparatus and method in sample pattern inspection apparatusKIMBA TOSHIFUMI·Filed 2007·Granted Oct 2, 2012·8 cites·17 claims
- 0481US8687197B2Method of monitoring progress of substrate polishing and polishing apparatusKIMBA TOSHIFUMI·Filed 2011·Granted Apr 1, 2014·5 cites·23 claims
- 0580US8639463B2Electron beam apparatus for inspecting a pattern on a sample using multiple electron beamsKIMBA TOSHIFUMI·Filed 2012·Granted Jan 28, 2014·4 cites·16 claims
- 0666US8771038B2Polishing apparatusKIMBA TOSHIFUMI·Filed 2008·Granted Jul 8, 2014·3 cites·8 claims
- 0761US8414355B2Substrate processing apparatusKIMBA TOSHIFUMI·Filed 2009·Granted Apr 9, 2013·2 cites·16 claims
- 0848US2005205781A1Defect inspection apparatusKIMBA TOSHIFUMI·Filed 2005·Application pending·0 cites
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