Assignee
KELEKAR RAJESH
US·16 granted patents·34 citations·filing 2007–2012
Top patents by PatentIndex Score
16 records- 0185US8728241B2Combinatorial site-isolated deposition of thin films from a liquid sourceKELEKAR RAJESH·Filed 2010·Granted May 20, 2014·3 cites·15 claims
- 0284US8220502B1Measuring volume of a liquid dispensed into a vesselKELEKAR RAJESH·Filed 2007·Granted Jul 17, 2012·12 cites·7 claims
- 0377US8617409B2Magnetically levitated gas cell for touchless site-isolated wet processingKELEKAR RAJESH·Filed 2011·Granted Dec 31, 2013·4 cites·20 claims
- 0474US8298621B2Stirring apparatus for combinatorial processingKELEKAR RAJESH·Filed 2011·Granted Oct 30, 2012·2 cites·15 claims
- 0574US8058171B1Stirring apparatus for combinatorial processingKELEKAR RAJESH·Filed 2008·Granted Nov 15, 2011·3 cites·22 claims
- 0672US8561627B1Calibration of a chemical dispense systemKELEKAR RAJESH·Filed 2008·Granted Oct 22, 2013·3 cites·15 claims
- 0771US8465590B2Emissivity profile control for thermal uniformityKELEKAR RAJESH·Filed 2011·Granted Jun 18, 2013·2 cites·11 claims
- 0863US8715518B2Gas barrier with vent ring for protecting a surface region from liquidKELEKAR RAJESH·Filed 2011·Granted May 6, 2014·1 cites·19 claims
- 0961US8528608B2Measuring volume of a liquid dispensed into a vesselKELEKAR RAJESH·Filed 2012·Granted Sep 10, 2013·1 cites·16 claims
- 1059US8234012B1Preparing a chemical delivery line of a chemical dispense system for deliveryKELEKAR RAJESH·Filed 2008·Granted Jul 31, 2012·3 cites·22 claims
- 1154US9164517B2Maintaining flow rate of a fluidKELEKAR RAJESH·Filed 2011·Granted Oct 20, 2015·0 cites·12 claims
- 1251US8883607B2Full wafer processing by multiple passes through a combinatorial reactorKELEKAR RAJESH·Filed 2011·Granted Nov 11, 2014·0 cites·6 claims
- 1348US8882919B2Combinatorial non-contact wet processingKELEKAR RAJESH·Filed 2010·Granted Nov 11, 2014·0 cites·13 claims
- 1445US8690136B2Internal rinsing in touchless interstitial processingKELEKAR RAJESH·Filed 2011·Granted Apr 8, 2014·0 cites·11 claims
- 1543US8728334B2Dynamic gas flow control of touchless reactor cellsKELEKAR RAJESH·Filed 2011·Granted May 20, 2014·0 cites·20 claims
- 1639US8783273B2No-contact wet processing tool with site isolationKELEKAR RAJESH·Filed 2011·Granted Jul 22, 2014·0 cites·12 claims
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