Assignee
KAWASAKI TAKAFUMI
JP·3 granted patents·18 citations·filing 2006–2007
Top patents by PatentIndex Score
3 records- 0183US8075647B2Slurry for slicing silicon ingot and method for slicing silicon ingot using the sameKAWASAKI TAKAFUMI·Filed 2006·Granted Dec 13, 2011·12 cites·11 claims
- 0273US8256407B2Multi-wire saw and method for cutting ingotKAWASAKI TAKAFUMI·Filed 2007·Granted Sep 4, 2012·6 cites·6 claims
- 0344US8098365B2Illumination optical system, exposure apparatus, and device manufacturing methodKAWASAKI TAKAFUMI·Filed 2007·Granted Jan 17, 2012·0 cites·12 claims
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