Assignee
KANNAN HIROSHI
JP·2 granted patents·1 citations·filing 2003–2010
Top patents by PatentIndex Score
2 records- 0142US8574448B2Plasma generation method, cleaning method, and substrate processing methodKANNAN HIROSHI·Filed 2010·Granted Nov 5, 2013·0 cites·20 claims
- 0242US8075698B2Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processingKANNAN HIROSHI·Filed 2003·Granted Dec 13, 2011·1 cites·19 claims
Join the waitlist — get patent alerts
Get an alert when KANNAN HIROSHI files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →