Assignee
KAMM FRANK-MICHAEL
0 granted patents·2 pending applications·0 citations·filing 2006–2008
Top patents by PatentIndex Score
2 records- 0146US2009219496A1Methods of Double Patterning, Photo Sensitive Layer Stack for Double Patterning and System for Double PatterningKAMM FRANK-MICHAEL·Filed 2008·Application pending·0 cites
- 0237US2006292459A1EUV reflection mask and method for producing itKAMM FRANK-MICHAEL·Filed 2006·Application pending·0 cites
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