Assignee
KAMEDA KENJI
JP·4 granted patents·41 citations·filing 2004–2012
Top patents by PatentIndex Score
4 records- 0179US8741783B2Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording mediumKAMEDA KENJI·Filed 2012·Granted Jun 3, 2014·5 cites·17 claims
- 0278US8115764B2Map display system, map data processing apparatus, map display apparatus, and map display methodKAMEDA KENJI·Filed 2004·Granted Feb 14, 2012·32 cites·26 claims
- 0376US9856560B2Method for manufacturing semiconductor device and substrate processing apparatusKAMEDA KENJI·Filed 2009·Granted Jan 2, 2018·2 cites·19 claims
- 0467US8679259B2Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vesselKAMEDA KENJI·Filed 2011·Granted Mar 25, 2014·2 cites·8 claims
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