Assignee
KAMAISHI TAKAYUKI
JP·1 granted patent·1 pending application·17 citations·filing 2007–2009
Top patents by PatentIndex Score
2 records- 0183US8191505B2Process gas introducing mechanism and plasma processing deviceKAMAISHI TAKAYUKI·Filed 2009·Granted Jun 5, 2012·17 cites·22 claims
- 0233US2010037959A1Method for supplying process gas, system for supplying process gas, and system for processing object to be processedKAMAISHI TAKAYUKI·Filed 2007·Application pending·0 cites
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