Assignee
KADKHODAYAN BABAK
US·4 granted patents·934 citations·filing 2008–2012
Technology mixH01J4
Top patents by PatentIndex Score
4 records- 0198US8402918B2Showerhead electrode with centering featureKADKHODAYAN BABAK·Filed 2009·Granted Mar 26, 2013·435 cites·14 claims
- 0298US8206506B2Showerhead electrodeKADKHODAYAN BABAK·Filed 2008·Granted Jun 26, 2012·434 cites·13 claims
- 0397US8161906B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2008·Granted Apr 24, 2012·49 cites·17 claims
- 0493US8313805B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2012·Granted Nov 20, 2012·16 cites·10 claims
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