Assignee
INTEGRATED AUTOMATION
7 granted patents·889 citations·filing 1983–1987
Top patents by PatentIndex Score
7 records- 0198US4622918AModule for high vacuum processingINTEGRATED AUTOMATION·Filed 1984·Granted Nov 18, 1986·400 cites·11 claims
- 0297US4662987AMethod of double floating transport and processing of wafers within a confined passagewayINTEGRATED AUTOMATION·Filed 1985·Granted May 5, 1987·351 cites·6 claims
- 0381US4853970AApparatus for processing digitized imagesINTEGRATED AUTOMATION·Filed 1987·Granted Aug 1, 1989·74 cites·11 claims
- 0467US4681776AImproved method for double floating transport and processing of wafersINTEGRATED AUTOMATION·Filed 1985·Granted Jul 21, 1987·33 cites·26 claims
- 0553US4663197AMethod and apparatus for coating a substrateINTEGRATED AUTOMATION·Filed 1983·Granted May 5, 1987·18 cites·11 claims
- 0638US4600471AMethod and apparatus for transport and processing of substrate with developing agentINTEGRATED AUTOMATION·Filed 1985·Granted Jul 15, 1986·9 cites·20 claims
- 0736US4620997AMethod for coating substratesINTEGRATED AUTOMATION·Filed 1984·Granted Nov 4, 1986·4 cites·12 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →