Assignee
INST OPTICS & ELECTRONICS CAS
CN·36 granted patents·8 pending applications·18 citations·filing 2015–2025
Top patents by PatentIndex Score
44 records- 0183US12085741B2Method for preparing super-resolution lens based on metal-dielectric strip array, and using method of super-resolution lensINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Sep 10, 2024·1 cites·13 claims
- 0283US9693829B2Microscopic surgery system and navigation method guided by optical coherence tomography (OCT) and automated OCT imaging field calibrationINST OPTICS & ELECTRONICS CAS·Filed 2015·Granted Jul 4, 2017·8 cites·9 claims
- 0380US9400220B2Method for detecting focus plane based on Hartmann wavefront detection principleINST OPTICS & ELECTRONICS CAS·Filed 2015·Granted Jul 26, 2016·3 cites·7 claims
- 0475US10025205B2Method for detecting focal plane based on grating talbot effectINST OPTICS & ELECTRONICS CAS·Filed 2015·Granted Jul 17, 2018·3 cites·2 claims
- 0572US12547081B2Illumination compensation methodINST OPTICS & ELECTRONICS CAS·Filed 2025·Granted Feb 10, 2026·0 cites·7 claims
- 0669US12306424B2Metasurface-based imaging system, design method, and detectorINST OPTICS & ELECTRONICS CAS·Filed 2023·Granted May 20, 2025·0 cites·10 claims
- 0769US9610022B1Adaptive optical objective inspection instrument for optic nerve functionINST OPTICS & ELECTRONICS CAS·Filed 2015·Granted Apr 4, 2017·2 cites·9 claims
- 0865US11675273B2Method of fabricating micro-nano structureINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Jun 13, 2023·0 cites·15 claims
- 0964US11714358B2Intelligent correction device control system for super-resolution lithography precision maskINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Aug 1, 2023·0 cites·21 claims
- 1060US12228710B1Ultra-wide angle broadband polarization imaging system based on metasurface, and detection apparatusINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted Feb 18, 2025·0 cites·9 claims
- 1160US12181794B2Photolithography methodINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted Dec 31, 2024·0 cites·12 claims
- 1260US12092960B2Mask topology optimization method and system for surface plasmon near-field photolithographyINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Sep 17, 2024·0 cites·13 claims
- 1360US11724962B2Method for etching curved substrateINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Aug 15, 2023·0 cites·19 claims
- 1459US12174322B2F-P sensor probe, absolute distance measurement device, and absolute distance measurement methodINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted Dec 24, 2024·0 cites·19 claims
- 1559US9846373B2High accuracy measurement system for focusing and levelingINST OPTICS & ELECTRONICS CAS·Filed 2016·Granted Dec 19, 2017·1 cites·8 claims
- 1658US12505266B2High-order rotational symmetry unit-based nonlinear geometric phase metasurfaceINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted Dec 23, 2025·0 cites·9 claims
- 1758US12100188B2Template mark detection method and template position correction method based on single cameraINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted Sep 24, 2024·0 cites·10 claims
- 1857US2024280901A1Photoresist composition and use thereofINST OPTICS & ELECTRONICS CAS·Filed 2022·Application pending·0 cites
- 1956US12078937B1Near-field lithography immersion system, immersion unit and interface module thereofINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted Sep 3, 2024·0 cites·10 claims
- 2056US11754352B2Visible light-transparent and radiative-cooling multilayer filmINST OPTICS & ELECTRONICS CAS·Filed 2018·Granted Sep 12, 2023·0 cites·6 claims
- 2154US12315117B2Illumination field non-uniformity detection system, detection method, correction method, and deviceINST OPTICS & ELECTRONICS CAS·Filed 2022·Granted May 27, 2025·0 cites·19 claims
- 2254US11868055B2Multifunctional lithography deviceINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Jan 9, 2024·0 cites·14 claims
- 2353US10962487B2Flaw detecting apparatus, method for detecting flaw of plane mirror based on line scanning and ring band stitchingINST OPTICS & ELECTRONICS CAS·Filed 2019·Granted Mar 30, 2021·0 cites·8 claims
- 2450US12085846B2Method for inverse optical proximity correction of super-resolution lithography based on level set algorithmINST OPTICS & ELECTRONICS CAS·Filed 2021·Granted Sep 10, 2024·0 cites·12 claims
- 2550US2020147753A1Method for controlling dwell time during processing to optical componentINST OPTICS & ELECTRONICS CAS·Filed 2019·Application pending·0 cites
- 2648US11163237B2Method for figure correction of optical element by reactive ion etchingINST OPTICS & ELECTRONICS CAS·Filed 2020·Granted Nov 2, 2021·0 cites·14 claims
- 2747US11592602B2Sub-wavelength structural material having patch type array and compatibility of low detectability for infrared, laser, and microwaveINST OPTICS & ELECTRONICS CAS·Filed 2018·Granted Feb 28, 2023·0 cites·12 claims
- 2846US11268808B2Detection device for detecting lens surface in stitching interferometerINST OPTICS & ELECTRONICS CAS·Filed 2019·Granted Mar 8, 2022·0 cites·13 claims
- 2946US11175472B2Three-dimensional dynamic adjustment and locking mechanismINST OPTICS & ELECTRONICS CAS·Filed 2018·Granted Nov 16, 2021·0 cites·4 claims
- 3045US10976670B2Apparatus and method for detecting optimal focal plane of lithographic projection objective lensINST OPTICS & ELECTRONICS CAS·Filed 2019·Granted Apr 13, 2021·0 cites·7 claims
- 3142US2019302390A1Horizontal precision adjustment and locking deviceINST OPTICS & ELECTRONICS CAS·Filed 2019·Application pending·0 cites
- 3241US12272530B2Ultra-large area scanning reactive ion etching machine and etching method thereofINST OPTICS & ELECTRONICS CAS·Filed 2018·Granted Apr 8, 2025·0 cites·15 claims
- 3341US2021011245A1Single-point driven axial adjustment mechanismINST OPTICS & ELECTRONICS CAS·Filed 2018·Application pending·0 cites
- 3440US11693320B2Secondary imaging optical lithography method and apparatusINST OPTICS & ELECTRONICS CAS·Filed 2018·Granted Jul 4, 2023·0 cites·20 claims
- 3540US10782248B2Automatic detection device and method for detecting surface detects of large caliber cambered optical elementINST OPTICS & ELECTRONICS CAS·Filed 2019·Granted Sep 22, 2020·0 cites·6 claims
- 3639US11061330B2Methods and apparatuses for coating photoresistINST OPTICS & ELECTRONICS CAS·Filed 2017·Granted Jul 13, 2021·0 cites·20 claims
- 3739US2021200079A1Negative refraction imaging lithographic method and equipmentINST OPTICS & ELECTRONICS CAS·Filed 2018·Application pending·0 cites
- 3838US10070782B2Adaptive optical retina imaging device and methodINST OPTICS & ELECTRONICS CAS·Filed 2016·Granted Sep 11, 2018·0 cites·10 claims
- 3938US2019137793A1Broadband electromagnetic wave phase modulating method and meta surface sub-wavelength structureINST OPTICS & ELECTRONICS CAS·Filed 2016·Application pending·0 cites
- 4037US11365964B2Stitching-measurement device and stitching-measurement methodINST OPTICS & ELECTRONICS CAS·Filed 2018·Granted Jun 21, 2022·0 cites·12 claims
- 4136US9537280B2Dual beamsplitting element based excimer laser pulse stretching deviceINST OPTICS & ELECTRONICS CAS·Filed 2015·Granted Jan 3, 2017·0 cites·7 claims
- 4236US2021364278A1Method And Device For Measuring Apex Radius Of Optical Element Based On Computer-Generated HologramINST OPTICS & ELECTRONICS CAS·Filed 2019·Application pending·0 cites
- 4336US2021332845A1Flexible hinge structureINST OPTICS & ELECTRONICS CAS·Filed 2018·Application pending·0 cites
- 4433US9829718B2Method for resisting noise of co-phasing system of dispersed fringe sensor and optical systemINST OPTICS & ELECTRONICS CAS·Filed 2016·Granted Nov 28, 2017·0 cites·8 claims
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