Assignee
INOUCHI YUTAKA
JP·2 granted patents·5 citations·filing 2006–2012
Top patents by PatentIndex Score
2 records- 0170US8147705B2Method of operating ion source and ion implanting apparatusINOUCHI YUTAKA·Filed 2006·Granted Apr 3, 2012·5 cites·2 claims
- 0240US8604683B2Bucket-type ion source for fanning cusped magnetic fields inside a plasma generation chamberINOUCHI YUTAKA·Filed 2012·Granted Dec 10, 2013·0 cites·6 claims
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