Assignee
IC MECHANICS INC
US·6 granted patents·359 citations·filing 2000–2003
Top patents by PatentIndex Score
6 records- 0198US7008812B1Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulationIC MECHANICS INC·Filed 2000·Granted Mar 7, 2006·269 cites·6 claims
- 0285US6778348B1Accelerometer-assisted servo writing for disk drivesIC MECHANICS INC·Filed 2000·Granted Aug 17, 2004·21 cites·35 claims
- 0379US7492019B2Micromachined assembly with a multi-layer cap defining a cavityIC MECHANICS INC·Filed 2003·Granted Feb 17, 2009·25 cites·9 claims
- 0478US6536280B1Thin film MEMS sensors employing electrical sensing and force feedbackIC MECHANICS INC·Filed 2000·Granted Mar 25, 2003·20 cites·30 claims
- 0569US7153717B2Encapsulation of MEMS devices using pillar-supported capsIC MECHANICS INC·Filed 2002·Granted Dec 26, 2006·20 cites·26 claims
- 0662US6819520B2Use of momentum transfer actuators for motion control of flexible mechanical structuresIC MECHANICS INC·Filed 2000·Granted Nov 16, 2004·4 cites·25 claims
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