Assignee
HOSHINO TADASHI
JP·0 granted patents·2 pending applications·0 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0137US2012012191A1Liquid recovery apparatus, exposure apparatus, liquid recovering method, device fabricating method, program, and storage mediumHOSHINO TADASHI·Filed 2011·Application pending·0 cites
- 0237US2012019803A1Cleaning method, liquid immersion member, immersion exposure apparatus, device fabricating method, program, and storage mediumHOSHINO TADASHI·Filed 2011·Application pending·0 cites
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