Assignee
HIGASHIHARA GO
JP·1 granted patent·1 pending application·3 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0167US8741553B2Aromatic hydrocarbon resin, underlayer film forming composition for lithography, and method for forming multilayer resist patternHIGASHIHARA GO·Filed 2011·Granted Jun 3, 2014·3 cites·12 claims
- 0233US2014246400A1Resin having fluorene structure and material for forming underlayer film for lithographyHIGASHIHARA GO·Filed 2012·Application pending·0 cites
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