Assignee
HIGASHI GREGG
US·5 granted patents·27 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0192US9175393B1Tiled showerhead for a semiconductor chemical vapor deposition reactorHIGASHI GREGG·Filed 2011·Granted Nov 3, 2015·16 cites·21 claims
- 0289US9136422B1Texturing a layer in an optoelectronic device for improved angle randomization of lightHIGASHI GREGG·Filed 2012·Granted Sep 15, 2015·8 cites·15 claims
- 0385US9212422B2CVD reactor with gas flow virtual wallsHIGASHI GREGG·Filed 2011·Granted Dec 15, 2015·3 cites·8 claims
- 0461US9982346B2Movable liner assembly for a deposition zone in a CVD reactorHIGASHI GREGG·Filed 2011·Granted May 29, 2018·0 cites·12 claims
- 0539US9644268B2Thermal bridge for chemical vapor deposition reactorsHIGASHI GREGG·Filed 2011·Granted May 9, 2017·0 cites·17 claims
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