Assignee
HENNIG MARIO
0 granted patents·3 pending applications·0 citations·filing 2006–2007
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0144US2009170024A1Method of Patterning a Substrate, Photosensitive Layer Stack and System for LithographyHENNIG MARIO·Filed 2007·Application pending·0 cites
- 0233US2006183258A1Imaging system and method for producing semiconductor structures on a wafer by imaging a mask on the wafer with a dipole diaphragmHENNIG MARIO·Filed 2006·Application pending·0 cites
- 0333US2006177773A1Method for producing semiconductor patterns on a waferHENNIG MARIO·Filed 2006·Application pending·0 cites
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