Assignee
HEMBACHER STEFAN
DE·2 granted patents·3 citations·filing 2010–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0175US9046794B2Cleaning module, EUV lithography device and method for the cleaning thereofHEMBACHER STEFAN·Filed 2010·Granted Jun 2, 2015·3 cites·40 claims
- 0251US9817322B2Optical imaging device and method for reducing dynamic fluctuations in pressure differenceHEMBACHER STEFAN·Filed 2011·Granted Nov 14, 2017·0 cites·57 claims
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