Assignee
HANA MAT INC
KR·0 granted patents·4 pending applications·0 citations·filing 2020–2025
Top patents by PatentIndex Score
4 records- 0162US2025349520A1Upper electrode assemblyHANA MAT INC·Filed 2025·Application pending·0 cites
- 0258US2024038503A1Focus ring and method for manufacturing the sameHANA MAT INC·Filed 2023·Application pending·0 cites
- 0356US2024274328A1Bush insert, bush assembly including the same and upper electrode assembling structure including the sameHANA MAT INC·Filed 2023·Application pending·0 cites
- 0456US2022371901A1Methods for Preparing Silicon Carbide Powder and Single Crystal Silicon CarbideHANA MAT INC·Filed 2020·Application pending·0 cites
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