Assignee
GYODA YUICHI
JP·5 granted patents·8 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0179US8811714B2Method, apparatus and medium for determining the intensity distribution formed on a pupil plane of an illumination optical systemGYODA YUICHI·Filed 2011·Granted Aug 19, 2014·3 cites·11 claims
- 0272US9551926B2Determination method, storage medium and information processing apparatusGYODA YUICHI·Filed 2012·Granted Jan 24, 2017·2 cites·11 claims
- 0371US8450031B2Determination method, exposure method and storage mediumGYODA YUICHI·Filed 2011·Granted May 28, 2013·2 cites·7 claims
- 0464US8584055B2Non-transitory computer-readable storage medium, decision method and computer for deciding exposure condition using evaluation item of interest and auxiliary evaluation itemGYODA YUICHI·Filed 2012·Granted Nov 12, 2013·1 cites·18 claims
- 0539US9268239B2Exposure method and storage mediumGYODA YUICHI·Filed 2011·Granted Feb 23, 2016·0 cites·11 claims
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